UV, VIS & NIR Reflectometers & Spectroscopic Ellipsometers for semi-transparent thin film charcterisation; Optical Emission Spectroscopy (OES) systems; Plasma Monitoring & Process Control Systems The ...
New metrology tool for characterising deposited film thickness on large area glass substrates for displays and other applications. Spatial resolution of 2 mm, measures film thickness from 100 nm to ...