ACM Research, a two-year-old Californian company, says it can see the end of the road for chemical mechanical polishing (CMP), and is looking to move in on the market with a non-contact process. It ...

Chipmakers are relying on machine learning for electroplating and wafer cleaning at leading-edge process nodes, augmenting traditional fault detection/classification and statistical process control in ...

MILPITAS, Calif. — NuTool Inc. has introduced a chemical mechanical polishing process using a fixed abrasive that is intended for polishing copper on ultra low-k (ULK) dielectrics with a k value of ...