Abstract: This article demonstrates a low-cost micro shell resonator forming by the wafer-level negative pressure driven reflow process. Negative pressure in the sealed mold cavity of the bonded fused ...
Abstract: In this paper, we report a low-cost, fast, and high-throughput process for releasing molded fused-silica 3D micro-shell resonators from their original flat substrate. 49% Hydrofluoric Acid ...
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